Semiconductor Wastewater Treatment

Committed to protecting the environment, conserving resources and to meeting new manufacturing challenges as they occur, Ovivo has developed a state of the art wastewater treatment process designed to meet current and future reclaim and discharge requirements.


Semiconductor fabrication processes such as chemical mechanical planarization (CMP), lithography, and etching, stripping and cleaning, result in a variety of wastewater compositions (CMP, BG, acid and alkaline waste, metal-bearing waste and organic waste), which require specialized treatment to meet stringent global and local reclamation and discharge regulations.

Ovivo’s wastewater treatment technology features:

  • Lowest chemical consumption
  • Lowest cost of ownership
  • Fluoride discharge limit >10 ppm.


Some examples of Ovivo semiconductor wastewater treatment solutions:

Treatment of CMP and Backgrind Water

CMP is an essential process in semiconductor fabrication. The resultant wastewater can be treated by flocculation and sedimentation to remove slurry particles.

Ovivo’s CMP and backgrind water treatment process guarantees:

  • Minimal chemical consumption and sludge generation
  • Control of sludge floatation using hydrogen peroxide
  • Treated water meets stringent discharge requirements


Treatment of Copper CMP Wastewater

Ovivo’s advanced oxidation process utilizes a meticulous, but advanced process to remove copper from copper CMP wastewater. This process adds a catalyst to copper waste using the oxidant already present to form a strong oxidizer. The strong oxidizer breaks down the complex copper and reduces the wastewater’s organic concentration. Copper can then be precipitated as copper hydroxide and removed with the slurry particles.

Ovivo’s cutting-edge oxidation process is notable for:

  • Lowest chemical consumption.
  • Achieving stringent wastewater discharge requirements.
  • Reducing not only copper, but also organics.
  • Simple, flexible and cost-effective operation.
  • Enhanced reliability


Ovivo offers tailored solutions for the treatment of all semiconductor wastewaters such as:

  • Treatment of fluoride bearing wastewater
  • Treatment of ammonia bearing wastewater
  • Treatment of general acids and alkaline wastewater
  • Specialty wastewater treatment
  • Biological organic reduction

Can HF containing waste streams be treated to very low fluoride levels (< 10 ppm)?

Yes, it is possible and state of the art nowadays. There are several process possibilities depending from which concentration you are starting.

Are there alternatives to the conventional Calcium Fluoride production treatment to treat the HF waste streams?

All in all, there is no real alternative. The fluoride need definitely to be removed out of the system and the only way is the chemical reaction with Fluoride and Calcium to form Calcium fluoride as amorphous precipitates or crystalline matter, except if you start from quite concentrated HF solutions (> 5% weight).

Can HF be recycled?

Yes, it is possible through evaporation, distillation processes if the starting concentration is high enough (> 5%).

Can CMP and BG waste streams be mixed and treated together?

Depending on CMP nature and composition which is mostly alkaline, it is not really recommended to mix it with BG streams for common treatment due to reaction of Silicon particles (BG) and alkalinity (CMP). As more segregation as more efficient are the treatment processes and their costs.

Numerous references, combined with our impressive list of installed facilities guarantees excellence and reliability supported by experienced employees.

Ovivo’s wastewater treatment solutions, means:

  • More than 60 active wastewater treatment systems worldwide
  • 13’000 m3 of Semiconductor wastewater treated hourly
  • Long-term, repeated customers in Asia, Europe and the US